摘要 |
PROBLEM TO BE SOLVED: To provide a constitution that can enhance further the shielding capability in an electrooptical substrate on which a shielding layer has been formed. SOLUTION: The electrooptical substrate 200 is provided with a constitution in which, a semiconductor layer is provided on a base 210, which is provided with a shielding layer 215 having a specific pattern, an insulating layer 212 formed on the shielding layer 215, and a semiconductor layer 206 formed on the insulating layer 212 respectively formed thereon. In the shielding layer 215, a silicon layer 214 is formed on a shielding body layer 211 having a specific pattern. COPYRIGHT: (C)2004,JPO&NCIPI |