摘要 |
PROBLEM TO BE SOLVED: To provide a small and lightweight radiation imaging apparatus which can be carried easily, and to provide its driving method and manufacturing method. SOLUTION: In the radiation imaging apparatus, both an imaging photoelectric transducer 1 for converting radiation into an image and a photoelectric transducer 2 for monitoring the dose of radiation are arranged. The photoelectric transducer 2 for monitoring is a TFT (thin film transistor) type element and its control electrode is connected with gate wiring, i.e. the control wiring of a TFT 3 connected with the imaging photoelectric transducer 1 as a switch element. Consequently, the wiring for routing up to an arranging position is reduced. When the dose of radiation is monitored, off voltage of the TFT, i.e. the depletion bias of a semiconductor layer, is applied to the control electrode of the photoelectric transducer 2 for monitoring and holes stored on the interface between an insulating film and the semiconductor layer are removed by the operating voltage of the TFT 3. COPYRIGHT: (C)2004,JPO&NCIPI
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