METHOD OF MANUFACTURING INKJET HEAD, INKJET HEAD, AND INKJET RECORDER

摘要

PROBLEM TO BE SOLVED: To obtain a uniform ink-ejection performance over all the nozzle holes in an inkjet head. SOLUTION: A material for forming a pressure chamber member is processed by a plurality of identical patterns by using a plurality of laser beams which are obtained by dividing a laser light radiated from the laser generating device 51 in a laser processing device 50 by using a diffraction optical device 57 to form the pressure chamber member. A piezoelectric material layer and two electrode layers are laminated such that the piezoelectric material layer is nipped by the electrode layers to form a laminated material, and then the laminated material is bonded to the pressure chamber member. After the bonding is carried out, the electrode layer of the laminated material at the opposite side of at least the piezoelectric material layer and the pressure chamber member is processed by a plurality of identical patterns by using the plurality of laser beams from the same laser processing device 50 as used in the process of forming the pressure chamber member to form an actuator. COPYRIGHT: (C)2004,JPO&NCIPI