CHARGED PARTICLE SPECTROMETER AND DETECTOR THEREFOR
摘要
A charged particle (e.g. photoelectron) spectrometer is operable in a first mode to produce an energy spectrum relating to the composition of a sample being analysed, and in a second mode to produce a charged particle image of the surface of the sample being analysed. A detector is used to detect charged particles produced in both modes of operation. A method of operation of the spectrometer includes the step of selecting which of said first and second modes to use and the detector being operated accordingly.
申请公布号
WO2004042775(A3)
申请公布日期
2004.08.12
申请号
WO2003GB04750
申请日期
2003.11.04
申请人
KRATOS ANALYTICAL LIMITED;PAGE, SIMON, CHARLES;PARK, COLIN, DUNCAN;HOPPER, CHRISTOPHER, MICHAEL
发明人
PAGE, SIMON, CHARLES;PARK, COLIN, DUNCAN;HOPPER, CHRISTOPHER, MICHAEL