GAS REMOVING APPARATUS OF CLEAN ROOM FACILITY

摘要

PROBLEM TO BE SOLVED: To provide a gas removing apparatus of a clean room facility capable of surely removing harmful gases contained in the atmospheric air and harmful gases generated in the clean room.

SOLUTION: This harmful gas removing apparatus 50 of the present invention is disposed at an underfloor space 42 of the clean room 12 where conditioned air supplied from an outdoor unit 14 and circulating air circulating in a clean room building 16 pass through. In this apparatus 50, air sucked into the underfloor space 42 passes through a water contact element 60 to humidify the harmful gases contained in the air, and the harmful gases are removed by gas-liquid contact with water. The humidified air is cooled by a cooling coil 62 to condense moisture, and the harmful gas components are taken into the condensate to completely remove the harmful gas components from the air.

COPYRIGHT: (C)2004,JPO&NCIPI