| 摘要 |
PROBLEM TO BE SOLVED: To avoid the occurrence of a hydrogen fluoride (HF) system corrosive product when a sheet-like material processed with polytetrafluoroethylene is subjected to electron beam treatment using a scan type electron beam irradiation equipment, the probability of the corrosion of a window foil by deposition of the corrosive product onto a widow foil corner part to which the wind cannot be delivered, and the deposition of the corrosive product onto the window foil corner part. SOLUTION: Notches are formed at both ends of a nozzle blow-off port of a cooling duct of an irradiation window foil of the electron beam irradiation equipment. The cooling wind, since going out of the notches toward the lateral direction, blows also on both the end corner parts of the window foil. A reaction product comprising a mixture of gas and liquid, is blown away if the cooling wind is strong. The device is configured such that the cooling wind blows also on the corner parts of the window foil, thereby preventing the corrosive deterioration by a deposition material with window foil corrosively-deteriorating effect, which is to deposited onto the corner parts. COPYRIGHT: (C)2004,JPO&NCIPI
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