发明名称 Method for producing a semiconductor component, and semiconductor component produced by the same
摘要 The invention relates to a method for producing a gate head which can be precisely scaled and for reducing parasitic capacities, for a semiconductor component comprising an at least approximately T-shaped electrode.
申请公布号 US2004157423(A1) 申请公布日期 2004.08.12
申请号 US20040483433 申请日期 2004.01.09
申请人 BEHAMMER DAG 发明人 BEHAMMER DAG
分类号 H01L21/285;H01L21/338;H01L29/423;(IPC1-7):H01L21/44 主分类号 H01L21/285
代理机构 代理人
主权项
地址