发明名称 Stellelement, seine Ansteuerung und seine Verwendung
摘要 The piezoelectric element (31) is arranged in a posture vertical to the guide rail, while a piezoelectric element (34) is arranged in a posture parallel to the guide rail. Further a stepped notch section is provided in the movable body (3), and the notched section substantially divides the movable body to two portions. When the piezoelectric element (31) displaces, a portion of the divided movable body is fixed between the guide rails (2a,2b). In this state, when the piezoelectric element (34) is displaced, the other portion of the movable body moves. Then, when the piezoelectric element (31) is returned to the original position, the fixing is released. Then, when the piezoelectric element (34) is returned to the original element, in association with it, also the other portion also moved.
申请公布号 DE69725676(T2) 申请公布日期 2004.08.12
申请号 DE1997625676T 申请日期 1997.07.31
申请人 SEIKO INSTRUMENTS INC., CHIBA;AGENCY OF INDUSTRIAL SCIENCE & TECHNOLOGY, TSUKUBA 发明人 ISHIKAWA, YUICHI;FURUTA, KAZUYOSHI;TOKIO, KITAHARA
分类号 B23Q5/22;B23Q5/28;B81B3/00;G05B19/18;G05B19/414;H01L41/09;(IPC1-7):H02K41/02 主分类号 B23Q5/22
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