| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To solve the problems wherein, when confirming a laminated structure of a device whose miniaturization and integration are advanced, resolution is insufficient in scanning electron microscope observation, and sample preparation for transmission electron microscope observation is required, and high throughput can not be realized, in the transmission electron microscope observation. <P>SOLUTION: This surface or section processing observation device comprises a means 1 for exposing the surface or the section by processing the sample 5 surface, and a scanning probe microscope means 6 for observing the exposed surface or section. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
