| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To extend a service life of electron emission and improve its reliability by outputting secondary electrons emitted from a substance being an emitter. <P>SOLUTION: Primary electrons impinge upon an emitter 16 of this electron emission element 10A for causing the emission of secondary electrons from the emitter 16 to output the secondary electrons from the electron emission element. The secondary electrons emitted from the emitter 16 are accelerated by an electric field formed on the emitter 16 for generating an electron beam. Specifically, the electron emission element 10A has the emitter 16 having a plate shape, a cathode electrode 18 formed on the front surface of the emitter 16, an anode electrode 14 formed on the back surface of the emitter 16. A drive voltage Va from a pulse generation source 20 is applied between the cathode electrode 18 and the anode electrode 14. The anode electrode 14 is connected to the ground. A collector electrode 22 is disposed above the cathode electrode 18. A bias voltage Vc is applied to the collector electrode 22. <P>COPYRIGHT: (C)2004,JPO&NCIPI</p> |
