| 摘要 |
PROBLEM TO BE SOLVED: To provide a film thickness measuring method which can make accurate thickness measurement even for a double refraction film having different orientations of crystals in the width direction, and also to provide a film manufacturing method using the thickness measuring method. SOLUTION: When the thickness of the film before wound up into a roll is measured based on the intensity of reflected or transmitted light and the refractive index value of the film, obtained by scanning a light interferential thickness meter in the width direction of the film, the relationship between portions in the film width direction and orientation angles of crystals in the portions and the relationship between the orientation angles of the crystals of the film and the measured thicknesses at the orientation angles are obtained in advance. Correction values in the portions in the film width direction are determined based on these relationships. Correction values corresponding to the positions in the film width direction are determined based on the relationship between the positions in the film width direction and the orientation angles and the relationship between the orientation angles of the film and the measured thicknesses previously obtained for correcting the measured thicknesses in the positions in the film width direction based on these correction values. Then, the measured thicknesses in the portions in the film width direction are corrected based on these correction values. COPYRIGHT: (C)2004,JPO&NCIPI
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