| 摘要 |
PROBLEM TO BE SOLVED: To realize a sucking and holding device capable of more surely sucking and holding a sheet by a very simple constitution without enhancing suction force, even if the sheet has a small warp. SOLUTION: A suction means 14 is constituted of a suction pad 14a formed into a trumpet shape to suck the sheet 11 by contacting a rear surface of the sheet 11, a fixing part 14b for fixing the suction pad 14a and a suction hole 14c provided on the fixing part 14b. The sheet 11 is sucked via a suction hole 14c provided on the fixing part 14b and the suction pad 14a. An opening part side of the suction pad 14a is projected as compared with a surface of a base 12. COPYRIGHT: (C)2004,JPO&NCIPI
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