| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for coating application of liquid which is capable of preventing adhesion of the liquid to a nozzle without using a specific means of removing a liquid pool. SOLUTION: A prescribed amount of the liquid L is discharged to the tip of the discharge nozzle 2 in a position apart from an object W to form the liquid pool and the discharge nozzle 2 is lowered toward the object W. The discharge nozzle 2 is stopped in a position where the liquid L discharged from the discharge nozzle 2 adheres to the object W, and the contact angleθbetween the liquid L and the outer peripheral surface of the discharge nozzle 2 attains≥90°. The discharge nozzle 2 is thereafter pulled up, as a result of which the liquid L slips off from the discharge nozzle 2. The liquid L can thus be applied to the object W without allowing the liquid L to remain around the nozzle 2. COPYRIGHT: (C)2004,JPO&NCIPI
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