Mask management device in semiconductor wafer production process

摘要

A wafer production management device includes: a process flow definition table storing for each type of wafer a production flow and a masking level applied in a production process; a basic production information table storing a mask set's name for each type of wafer; a mask information definition table storing for each mask set a plurality of masks' names correlated with a masking level; a lot information table storing a production flow and a type of wafer for each production lot; a processing portion selecting from the basic production information table a mask set's name corresponding to a type of wafer stored for each production lot; a processing portion extracting a masking level based on the current step and the process flow definition table; and a processing portion driven by the mask set's name and the masking level to select a mask's name from the mask information definition table.