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发明名称
Verfahren und Vorrichtung zum Behandeln von auf einem Substrat angeordneten elektronischen Bauteilen, insbesondere von Halbleiterchips
摘要
申请公布号
DE59909906(D1)
申请公布日期
2004.08.12
申请号
DE1999509906
申请日期
1999.07.02
申请人
ALPHASEM AG, BERG
发明人
WIRZ, GUSTAV
分类号
H01L21/00;H01L21/56;H01L23/31;(IPC1-7):H01L21/00
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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