| 摘要 |
PROBLEM TO BE SOLVED: To obtain a porous glass body by a vapor phase deposition capable of manufacturing a fluorine-added synthetic quartz glass material where fluorine is uniformly added and distortion hardly remains. SOLUTION: When the radius of the porous glass body is R, the bulk density of the range from the center to the 0.8R is 0.3-0.7 g/cm<SP>3</SP>and the fluctuation of the bulk density is within±0.005 g/cm<SP>3</SP>per 1mm of radius. The porous glass body is manufactured by controlling the difference of the temperature of the center of the growing point A, which is assumed to be the highest temperature and glass microparticles are deposited there at the lower end of the porous glass body 3, and the temperature of the range from the center to 0.8R within 100°C, in forming the cylindrical porous glass body 3 by supplying a glass material gas, hydrogen, and oxygen into a burner 2, synthesizing glass microparticles in an oxyhydrogen flame and depositing them at the tip of the starting member 1. COPYRIGHT: (C)2004,JPO&NCIPI
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