| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate having a division part which can be divided into plural product substrates, and ensure accurate and speedy three-dimensional measuring and inspection. SOLUTION: The three-dimensional measuring device 1 comprises an irradiation means 5 for three-dimensional measuring, a CCD camera 6 and a main control means 7. A print substrate K has a division part which can be divided into plural blocks. The main control means 7 performs three-dimensional measuring and inspection by obtaining the heights of plural cream solders arranged on the respective blocks. In the three-dimensional measuring, the reference height is set for each block, and the heights of the corresponding cream solders are measured based on the reference heights. Even if a difference in height occurs among discrete blocks with the division part defined as a boundary, three-dimensional measuring can be conducted accurately and speedily. COPYRIGHT: (C)2004,JPO&NCIPI
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