发明名称 COATING DEVICE AND COATING APPLICATION METHOD AND METHOD FOR MANUFACTURING MEMBER FOR DISPLAY
摘要 <P>PROBLEM TO BE SOLVED: To provide a coating device and coating application method capable of performing high-grade coating application at a uniform film thickness right after switching of a coating liquid to different dies without any defects at all and a method for manufacturing a member for display. <P>SOLUTION: The coating device is equipped with a plurality of applicators which have spouts extending to one direction in order to discharge the coating liquid, a plurality of coating liquid supply means for supplying the coating liquid to the applicators, a stage for holding a member to be coated, a moving means for relatively moving at least either of the applicator and the stage to a direction orthogonal to the longitudinal direction of the applicators, rising and falling means for respectively independently bringing the plurality of the applicator closer to the member to be coated, at least two liquid receptacles which recover the coating liquid discharged from the plurality of the applicator and are movable relatively to the applicators, and a controller which successively selects the applicators for performing coating application from the plurality of the applicators and makes the applicators perform coating application. <P>COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004223439(A) 申请公布日期 2004.08.12
申请号 JP20030015782 申请日期 2003.01.24
申请人 TORAY IND INC 发明人 KITAMURA YOSHIYUKI;GOTO TETSUYA
分类号 G03F7/16;B05C5/02;B05C11/10;B05D1/26;B05D3/00;H01L21/027 主分类号 G03F7/16
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