| 摘要 |
PROBLEM TO BE SOLVED: To provide a solid Etalon filter for realizing a temperature characteristic of 3 pm/°C or less. SOLUTION: The solid Etalon filter 4 of LiTaO<SB>3</SB>uses LiTaO<SB>3</SB>as a substrate material, and after a transparent conductive film 6 has been deposited on the incident and exiting planes of the LiTaO3 substrate 5 processed to predetermined thickness, a reflecting film 7 is deposited on the surface of the transparent conductive film 6, and further, a conductive film 8 is deposited on the peripheral side walls of the LiTaO<SB>3</SB>substrate 5. This embodiment is characterized in that to prevent electric charges from being generated on the incident and exiting planes of the LiTaO<SB>3</SB>substrate 5, conductive films are formed on the surfaces of the LiTaO<SB>3</SB>processed to the predetermined thickness, and the conductive films are electrically grounded. COPYRIGHT: (C)2004,JPO&NCIPI
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