发明名称 Method for manufacturing a probe card
摘要 A method for manufacturing a probe card, which includes a contact provided on a base substrate and electrically coupled to a terminal of an electronic device, for receiving and/or sending a signal from and/or to the electronic device, includes a first contact formation step of forming a first contact of the contacts on a first surface of a first sacrificial substrate, a second contact formation step of forming a second contact of the contacts of a first surface of a second sacrificial substrate, a signal transmission line formation step of forming a signal transmission line in the base substrate, a first contact joining step of attaching the first surface of the first sacrificial substrate to the base substrate and joining the first contact to the signal transmission line and a second contact joining step of attaching the first surface of the second sacrificial substrate to the base substrate and joining the second contact to the signal transmission line.
申请公布号 US2004155009(A1) 申请公布日期 2004.08.12
申请号 US20040771876 申请日期 2004.02.04
申请人 WADA KOICHI;MAEDA YASUHIRO 发明人 WADA KOICHI;MAEDA YASUHIRO
分类号 G01R1/067;G01R1/073;G01R3/00;(IPC1-7):H01B13/00 主分类号 G01R1/067
代理机构 代理人
主权项
地址