TEMPERATURE CONTROL DEVICE AND TEMPERATURE CONTROL METHOD BOTH USING PELTIER ELEMENT

摘要

A temperature control device and temperature control method both using a Peltier element. Heat insulation of the Peltier element and its connection elements is achieved without installing a vacuum vessel containing the Peltier element and its connection elements and its associated apparatus. Further, the system cost or apparatus cost can be reduced by simplifying the structure of the system or apparatus, and the accuracy of the control of the temperature at the contact surface according to the temperature determined by a temperature sensor can be improved. By using the temperature control device having a Peltier element, an object the temperature of which is to be controlled is rapidly cooled or heated through the contact surface of a conductor in contact with the object by the Peltier effect produced when a DC voltage is applied between the Peltier element and an electrode-cum-heat sink. The temperature control device is characterized in that an end cover is provided to cover the conductor, the Peltier element, and the whole or a part of the contact surface of the electrode-cum-heat sink, a gas layer having a closed space defined inside the cover and filled with gas is provide, and a heat insulating layer composed of a heat insulator is provided between the conductor and the gas layer in the closed space.