| 发明名称 |
Plate manipulation device |
| 摘要 |
The handling device (1) has a pneumatically operated holder providing hydrodynamic retention forces for a semiconductor disc, a centre (3), having jet bores (5) around the outside of a suction pad (6) with suction bores (6a), provided by a reception device (4) supported by the handling device for rotation about its central axis, via an associated drive.
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| 申请公布号 |
EP1445792(A2) |
申请公布日期 |
2004.08.11 |
| 申请号 |
EP20040001552 |
申请日期 |
2004.01.26 |
| 申请人 |
INFINEON TECHNOLOGIES AG |
发明人 |
AIGNER, KURT, DR.;BINDER, ALFRED;MATSCHITSCH, MARTIN;MICHENTHALER, NORBERT;KROUPA, GERHARD;PUCHER, GERHARD |
| 分类号 |
H01L21/683;(IPC1-7):H01L21/68 |
主分类号 |
H01L21/683 |
| 代理机构 |
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代理人 |
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| 主权项 |
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