| 摘要 |
PURPOSE: An automatic leveler for semiconductor equipment is provided to precisely control horizontality of semiconductor equipment by automatically controlling the horizontality of the semiconductor equipment based upon a detection signal generated from a light receiving device according to a position of a mask material. CONSTITUTION: The semiconductor equipment(106) is placed on a support unit(104). At least two height controlling legs(102a,102b,102c,102d) are installed in different region of the support unit to control the vertical height of the semiconductor equipment according to a quantity of induced air. A leveler unit(108) is placed on a horizontal surface of equipment positioned on the height control unit, provided with a mask material(1082) floating in a liquid according to the horizontality of the equipment. A sensor unit generates a detection signal by detecting the mask material, positioned in the right-and-left direction of the mask material. A control block(110) selects at least one of the height controlling legs based upon the detection signal received by the sensor unit and transmits a control signal for controlling the height of the selected height controlling leg. An air supply apparatus(112) supplies air to the selected height controlling leg according to the control signal transmitted from the control block.
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