| 摘要 |
PURPOSE: A steering angle sensing apparatus and a method for manufacturing the same are provided to remarkably reduce the size of the apparatus by fabricating one chip including a gear, a mass, and a magnetic sensor through a semiconductor process. CONSTITUTION: A steering angle sensing apparatus includes a rotary mass member and a magnetic sensing part and a magnetic field forming structure. The rotary mass member and the magnetic sensing part are fabricated on a single substrate layer. The rotary mass member and the magnetic sensing part include a fine mass member, a fixture part, a driving part, a support beam(12), and a magnetic sensor. The fine mass member is capable of rotating due to an external stimulus. The support beam(12) supports the fine mass member and provides elasticity. The fixture member is connected to the support beam(12) and fixed to the substrate. The driving part is connected to the fine mass member and rotates the fine mass member under a control signal.
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