发明名称 |
Methods and apparatus for transporting substrate carriers |
摘要 |
According to a first aspect, a first conveyor system is provided that is adapted to deliver substrate carriers within a semiconductor device manufacturing facility. The first conveyor system includes a ribbon that forms a closed loop along at least a portion of the semiconductor device manufacturing facility. The ribbon is adapted to (1) be flexible in a horizontal plane and rigid in a vertical plane; and (2) transport a plurality of substrate carriers within at least a portion of the semiconductor device manufacturing facility. Numerous other aspects are provided, as are systems, methods and computer program products in accordance with these and other aspects. <IMAGE>
|
申请公布号 |
EP1445794(A2) |
申请公布日期 |
2004.08.11 |
申请号 |
EP20040250424 |
申请日期 |
2004.01.27 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
RICE, MICHAEL R;LOWRANCE, ROBERT B;ELLIOT, MARTIN R;HUDGENS, JEFFREY C.;ENGLHARDT, ERIC ANDREW |
分类号 |
B65G49/07;H01L21/677;H01L21/68;(IPC1-7):H01L21/00 |
主分类号 |
B65G49/07 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|