DIAMOND DISK OF CONDITIONER

摘要

PURPOSE: A diamond disk of a conditioner is provided to prevent generation of scratches on a surface of a wafer in a polishing process by removing diamond particles separated from a lower side of a diamond disk. CONSTITUTION: A diamond disk is adhered at a lower side of a conditioning end effector of a conditioner for conditioning a polishing pad of CMP equipment in order to condition the polishing pad. The diamond disk includes a disk(20) and a conditioning brush(30). A loading groove(21) is formed at a lower side of the disk. Diamond particles are adhered on the lower side except for the loading groove. The conditioning brush is formed with a brush body(31) installed on the loading groove and a brush(32) installed at a lower side of the brush body.