METHOD FOR FORMING A SHALLOW TRENCH ISOLATION STRUCTURE WITH IMPROVED CORNER ROUNDING,申请号KR20047010183-传众专利搜索

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发明名称	METHOD FOR FORMING A SHALLOW TRENCH ISOLATION STRUCTURE WITH IMPROVED CORNER ROUNDING
摘要
申请公布号	KR20040071266(A)	申请公布日期	2004.08.11
申请号	KR20047010183	申请日期	2002.12.11
申请人		发明人
分类号	H01L21/76;H01L21/762	主分类号	H01L21/76
代理机构		代理人
主权项
地址

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