发明名称 |
A METHOD FOR MOLDING A POLYMER SURFACE THAT REDUCES PARTICLE GENERATION AND SURFACE ADHESION FORCES WHILE MAINTAINING A HIGH HEAT TRANSFER COEFFICIENT |
摘要 |
The invention provides a system and apparatus by which a workpiece pad is supplied to support workpieces being implanted in a rotating or spinning batch implanter process disk. The workpiece pad provides reduced surface adhesion forces and sufficient heat transfer from the workpieces to the process disk, and furthermore reduces particle generation and contamination of the workpiece from the workpiece pad. The workpiece pad furthermore comprises an ordered array of micro-structures. In addition, the invention includes a method of forming a workpiece pad comprising an ordered array of micro-structures. |
申请公布号 |
EP1444716(A2) |
申请公布日期 |
2004.08.11 |
申请号 |
EP20020802866 |
申请日期 |
2002.11.07 |
申请人 |
AXCELIS TECHNOLOGIES INC. |
发明人 |
LAGOS, BRYAN |
分类号 |
H01J37/317;H01L21/687;(IPC1-7):H01J37/317;H01L21/00 |
主分类号 |
H01J37/317 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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