Method for producing an organic film

摘要

A method for producing an organic film using a compound represented by a general formula (1) ABXn (where A is a carbon-containing group; B is at least one element selected from Si, Ge, Sn, Ti and Zr; X is a hydrolyzable group; and n is 1, 2 or 3 as a raw material, comprising: measuring the compound in an amount required for one time application on a surface of a substrate and supplying it to the predetermined surface of the substrate at each time of application through a nozzle, bringing the compound into contact with the surface of the substrate causing an elimination reaction between an active hydrogen on the surface of the substrate and the hydrolyzable group in parts of the molecules of the compound to the surface; and forming at least two kinds of different surfaces of substrate at one time.