NON-CORROSIVE CLEANING COMPOSITION FOR REMOVING PLASMA ETCHING RESIDUES,申请号EP20000984560-传众专利搜索

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发明名称	NON-CORROSIVE CLEANING COMPOSITION FOR REMOVING PLASMA ETCHING RESIDUES
摘要
申请公布号	EP1230334(A4)	申请公布日期	2004.08.11
申请号	EP20000984560	申请日期	2000.10.20
申请人		发明人
分类号	G03F7/42;B08B3/08;C09K13/00;C11D7/10;C11D7/26;C11D7/32;C11D7/60;C11D11/00;C23G1/04;H01L21/027;H01L21/304;H01L21/3065;(IPC1-7):C11D7/26;C11D7/50;H01L21/00	主分类号	G03F7/42
代理机构		代理人
主权项
地址

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