FLOW METER IN SEMICONDUCTOR FABRICATING EQUIPMENT

摘要

PURPOSE: A flow meter in semiconductor fabricating equipment is provided to measure flowrate and a flow direction of chemicals by connecting a disc-type rotation plate with different speed and direction of rotation to an input terminal and an output terminal of a chemical line. CONSTITUTION: A connection unit connects the input and output terminals of the chemical line from the semiconductor fabricating equipment. A disc-type rotation plate(112) is fixed to the connection unit in the right-and-left direction by a fixing screw(108a,108b) and a rotation axis(110). The rotation speed and direction of the disc-type rotation plate varies with the flowrate and the flow direction of the chemicals supplied through the chemical line.