METHOD FOR CORRECTING TIS IN OVERLAY EQUIPMENT

摘要

PURPOSE: A method for correcting TIS(Tool Induced Shift) of overlay equipment is provided to correct a vertical error between an optic system and a chuck in a mis-registration measurement process and maximize the accuracy by performing a correction process. CONSTITUTION: A first TIS correction process is performed to measure an X and a Y offset in cases of 0 degree and 180 degrees and transfer a correction result using the measured X and Y offsets to a recipe. A second TIS correction process is performed to measure the X and the Y offsets in cases of 90 degrees(S3) and 270 degrees(S4) and transfer the correction result using the measured X and Y offsets to the recipe.