发明名称 |
Method and apparatus for restricting process fluid flow within a showerhead assembly |
摘要 |
A system and method are disclosed for restricting process fluid flow within a showerhead assembly which includes a process chamber (12) with a showerhead assembly (20) disposed therein. The showerhead assembly (20) has a blocking assembly (24) disposed within the showerhead assembly (20) for restricting the flow of process fluid within the showerhead assembly (20). Restricting the flow of process fluid within the showerhead effectively restricts the flow of process fluid exiting a center portion (30) of showerhead assembly (20), directed at a substrate wafer (16) disposed within the process chamber (12).
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申请公布号 |
US6773617(B2) |
申请公布日期 |
2004.08.10 |
申请号 |
US20020309863 |
申请日期 |
2002.12.04 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
ROSE DAVID JAY |
分类号 |
C23C16/44;C23C16/455;H01L21/00;(IPC1-7):C23F1/00;H01L21/306 |
主分类号 |
C23C16/44 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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