发明名称 Making grooves in planar waveguides
摘要 A method of producing a planar waveguiding device having a core [10] and a cladding [17]. The cladding has groves [11,12] directly interfacing [15,16] with the core [10]. A layer of core glass [10] is deposited on the surface of a substrate [23,24]. This layer is etched to produce a shaped layer which includes a first core portion [10] having the same configuration as the intended core [10] and an expanded core portion [30] wherein the core glass extends beyond the intended core boundary. A glass covering layer [21] is deposited over the etched core glass and grooves [11,12] are produced by etching through the covering layer [21] and into said expanded core portion [30]. This removes the core glass [30] extending beyond the intended core [10] boundary to produce interfaces [15,16] between the core [10] and the grooves [11,12]. All of the glasses are silica with additives to adjust the refractive index and/or the melting point.
申请公布号 US6773615(B1) 申请公布日期 2004.08.10
申请号 US20010959329 申请日期 2001.10.23
申请人 BRITISH TELECOMMUNICATIONS PUBLIC LIMITED COMPANY 发明人 ROGERS DAVID C;MAXWELL GRAEME D;POUSTIE ALISTAIR J
分类号 C03C15/00;G02B6/12;G02B6/125;G02B6/13;G02B6/132;G02B6/136;G02B6/34;G02F1/01;G02F1/225;(IPC1-7):B29D11/00;H01L21/00 主分类号 C03C15/00
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