发明名称 |
Operation-supervision integrated interface |
摘要 |
A new software support package is provided that monitors tool status and scheduling requirements in a semiconductor manufacturing environment. A multiplicity of tools interfaces with a Manufacturing Execution system (MES) that is a functional component of the Operation and supervision integrated MES user Interface (OMI). A User Interface (UI) function, which is also part of the OMI, interfaces between a multiplicity of users (of the OMI functions) and the MES sub-component of the OMI system.
|
申请公布号 |
US6775584(B1) |
申请公布日期 |
2004.08.10 |
申请号 |
US20010942289 |
申请日期 |
2001.08.30 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY |
发明人 |
HUANG CHIEN-CHUNG;CHU HSIAO-LUNG;HUANG YU-FENG |
分类号 |
G05B19/418;G06F19/00;(IPC1-7):G06F19/00 |
主分类号 |
G05B19/418 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|