| 摘要 |
Sonic transducers utilize resonant cavities of varying depths to achieve wide operational bandwidth. The transducers may include a conductive membrane spaced apart from one or more backplate electrodes. In one approach, spacing is achieved using a dielectric spacer having a series of depressions arranged in a pattern, the depressions forming cavities each resonant at a predetermined frequency. In another approach, the conductive membrane is piezoelectrically active, and the transducer is simultaneously driven in both piezoelectric and electrostatic modes.
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