发明名称 |
Method and apparatus for wafer-level testing of semiconductor laser |
摘要 |
A system and method for manufacturing and wafer-level testing properties of a wafer comprises a chuck receiving a wafer to be tested and a pump light source directing an output beam toward selected locations on a wafer received on the chuck in combination with a laser light detector detecting light emitted from the wafer and a pump beam aiming mechanism selectively varying a position at which the pump light source output beam enters the wafer.
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申请公布号 |
US6775000(B2) |
申请公布日期 |
2004.08.10 |
申请号 |
US20010033975 |
申请日期 |
2001.12.19 |
申请人 |
NOVALUX, INC. |
发明人 |
HARRISON JAMES;HEALD DAVID LESLIE |
分类号 |
G01N21/63;H01S5/00;H01S5/02;(IPC1-7):G01N21/00 |
主分类号 |
G01N21/63 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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