| 摘要 |
The present invention provides manufacturing methods of electrostatic type MEME devices, in which planarizing the surface of a driving side electrode, reducing fluctuations in the shape of a beam, improving the performance and the uniformity are aimed at. <??>A manufacturing method according to the present invention includes the steps of: forming a substrate side electrode on a substrate, forming a fluid film before or after forming a sacrificial layer, further forming a beam having a driving side electrode on a planarized surface of the fluid film, and finally, removing the sacrificial layer. <IMAGE>
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