METHOD OF MANUFACTURING FIELD PROGRAMMABLE GATE ARRAY

摘要

PURPOSE: A method of manufacturing an FPGA(Field Programmable Gate Array) is provided to improve the reliability by forming a program-off line region in a via forming process. CONSTITUTION: A first IMD(Inter Metal Dielectric)(18) for filling a gap between first metal lines(17) is deposited on a PMD(Pre-Metal Dielectric)(15) and planarized by using CMP(Chemical Mechanical Polishing). A plurality of via parts(20) for contacting the first metal lines are formed in the first IMD. At this time, a program-off line region(A) is defined. Second metal lines(21) for contacting the via parts are formed on the first IMD. A second IMD(22) for filling a gap between the second metal lines is deposited on the first IMD and planarized by using CMP.