发明名称 |
TRANSISTOR HAVING HIGH OPERATION VOLTAGE AND MANUFACTURING METHOD THEREOF |
摘要 |
PURPOSE: A transistor having a high operation voltage and a manufacturing method thereof are provided to obtain easily a high voltage device without the growth of a thick gate oxide layer and an additional ion-implantation and to reduce the size of the high voltage device by using a nitride layer. CONSTITUTION: A field region(20) is formed in a substrate by using a trench process. A nitride layer is formed on the entire surface of the resultant structure. The nitride layer is selectively left on a gate forming region to control an operation voltage. A gate oxide layer and a gate electrode are sequentially formed on the substrate. At this time, the remaining nitride layer is enclosed with the gate electrode. By using an ion-implantation, a source/drain are formed in the substrate to align the gate electrode.
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申请公布号 |
KR20040069778(A) |
申请公布日期 |
2004.08.06 |
申请号 |
KR20030006318 |
申请日期 |
2003.01.30 |
申请人 |
ANAM SEMICONDUCTOR., LTD. |
发明人 |
BAEK, SEUNG YEOK |
分类号 |
H01L21/336;(IPC1-7):H01L21/336 |
主分类号 |
H01L21/336 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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