APPLY DEVICE OF SOLUTION AND APPLY METHOD THEREOF, CAPABLE OF APPLYING SOLUTION IN ALMOST UNIFORM DISTRIBUTIVE STATE

摘要

PURPOSE: An apply device of a solution and an apply method are provided to remember plural nozzle positions installed on heads as coordinates data, and to control a discharge of a solution from each nozzle according to applied patterns of the solution and the coordinates data, thereby applying the solution in almost uniform distributive state. CONSTITUTION: Drivers(20) formed on each head(9) are controlled by a control device(21). X and Y coordinates of each nozzle formed on the heads(9) are remembered in the control device(21). The X and Y coordinates of the nozzles are set according to mounting positions of the heads(9) after mounting each head(9) on a mounting member. The control device(21) controls a driving of the drivers(20) according to applied patterns of a solution applied to a substrate, and operates piezoelectric elements corresponding to the nozzles for discharging the solution.