MOUNTING APPARATUS OF WAFER CASSETTE CARRIER AND METHOD THEREOF

摘要

PURPOSE: A mounting apparatus of a wafer cassette carrier and a method thereof are provided to prevent damage of a wafer by mounting stably the cassette carrier using a slip guide. CONSTITUTION: A mounting apparatus(1) of a wafer cassette carrier includes a plurality of slip guides(8). The plural slip guides have tilted surfaces in order to guide exactly the cassette carrier to a desired position. The angle of the tilted surface is in the range of 45 to 80 degrees. The slip guide is made of ceramic. The slip guide includes a slip guide part and a fixing screw part.