| 摘要 |
PURPOSE: A wafer buffer stage is provided to prevent previously a process error by loading correctly a wafer on the center of a plate by a position control unit. CONSTITUTION: A wafer is loaded on an upper surface of a plate(110). A plurality of guide pins(120) are installed at the plate. The guide pins are used for supporting the wafer loaded on the upper surface of the plate. A position control unit(130) is used for controlling a position of the wafer in order to load correctly the wafer on the guide pins. The position control unit includes a motor(132), a lead screw(136) rotated by the motor, and a moving block(138) having a screw member. The moving block is moved in a straight line when the lead screw is rotated by the motor.
|
