ION SOURCE OF ION INJECTION APPARATUS

摘要

PURPOSE: An ion source of an ion injection apparatus is provided to protect an end cap of an arc chamber in case of creating a beam and to create efficiently a plasma in the arc chamber. CONSTITUTION: An ion source(110) of an ion injection apparatus comprises an arc chamber(112) into which a gas is injected for an ion injection process, a filament(114) for emitting a thermion to ionize the gas inside the arc chamber, and a reflector(116) for repelling the thermion in opposition to the filament and located at a center of the arc chamber and rocking to achieve efficiently a creation of a plasma in the arc chamber. The reflector is a square type and has a round corner.