发明名称 DEVICE FOR TREATING OBJECTS BY PLASMA DEPOSITION
摘要 A device for treating objects by plasma deposition, comprising: a sealed treatment chamber (1), at a reduced pressure, provided on one of its walls (4) with a passage (2) that can be closed off, said passage (2) allowing objects for treatment (3) to be conveyed into and out of the treatment chamber (1), a transfer space (5) which can be placed, via said passage (2), in communication with the treatment chamber (1) so that objects for treatment (3) are introduced into the transfer space (5) prior to being introduced into the treatment chamber (1), the device being characterized in that the transfer space (5): is delimited by discontinuous walls (6,7), is able to move relative to the treatment chamber (1) so as to be able to negotiate the passage (2) of the treatment chamber (1).
申请公布号 KR20040070244(A) 申请公布日期 2004.08.06
申请号 KR20047009529 申请日期 2002.12.16
申请人 发明人
分类号 C23C14/50;H01J37/32;H01J1/00 主分类号 C23C14/50
代理机构 代理人
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