POWER SUPPLY CONNECTOR PREVENTED FROM DETERIORATION

摘要

PURPOSE: A power supply connector prevented from deterioration is provided to fabricate a power supply connector using PEEK(PolyEther Ether Ketone) to prevent a power supply from deterioration. CONSTITUTION: A power supply connector includes a conductive metal pin(3), a cylindrical PEEK socket(4), and a cylindrical connecting part(5). The cylindrical PEEK socket surrounds the metal pin. The cylindrical connecting part is made of PEEK and connected to the socket. The cylindrical socket includes a nut and a washer. The metal pin of a power supplies power to a semiconductor manufacturing apparatus.