APPARATUS AND METHOD FOR CLEANING PROBE NEEDLE

摘要

PURPOSE: An apparatus and method for cleaning a probe needle are provided to check exactly cleaning-error period without unnecessary cleaning by using a cleaning-error database. CONSTITUTION: An apparatus(1) for cleaning a probe needle includes a substrate fixing plate, a substrate, a probe card, a test head, a tester and a main controller. The substrate fixing plate(13) is used for loading the substrate(12). The substrate includes a chip array with a plurality of electrode pads. The probe card(17) includes a plurality of probes. Each probe has a probe needle(17b) corresponding to the electrode pad of the chip array. The test head is used for transmitting a test signal to the probe card and receiving test result of the probe card. The tester(50) is used for controlling the test head and analyzing a signal transmitted from the test head. The main controller(70) includes a test result database(77) and a cleaning-error database(79). The generation of cleaning-error is checked by comparing the test result database with the cleaning-error database using a cleaning-error analysis program(73,75).