SYSTEME ET PROCEDE DE METROLOGIE IN SITU,申请号FR19980015143-传众专利搜索

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发明名称	SYSTEME ET PROCEDE DE METROLOGIE IN SITU
摘要
申请公布号	FR2771666(B1)	申请公布日期	2004.08.06
申请号	FR19980015143	申请日期	1998.12.01
申请人	ZYGO CORPORATION	发明人	TINKER FLEMMING
分类号	B24B37/015;B24B49/14;G01B11/30;(IPC1-7):B24B49/12;B24B13/00	主分类号	B24B37/015
代理机构		代理人
主权项
地址

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