SEMICONDUCTOR DEVICE WITH CAPACITOR USING NANO TUBE AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A semiconductor device with a capacitor using a nano tube and a manufacturing method thereof are provided to increase considerably capacitance by using a conductive nano tube array as a lower electrode of the capacitor. CONSTITUTION: The first insulating layer(110) with contacts(115) is formed on a substrate(105). The second insulating layer(135) with a lower electrode region(150) is formed on the first insulating layer. A nano tube array(140) as a lower electrode is formed in the lower electrode region to be electrically connected with the contact. The nano tube array includes a plurality of conductive nano tubes. Then, a dielectric layer and an upper electrode are sequentially formed on the resultant structure.