LAMP HOUSING STRUCTURE OF SEMICONDUCTOR EQUIPMENT

摘要

PURPOSE: A lamp housing structure of semiconductor equipment is provided to exhaust compulsorily the heat of a mercury-xenon lamp assembly by using a protection cover and a fan. CONSTITUTION: A handle(1) for adjusting a xenon lamp is installed at one side of the xenon lamp(2). A power supply cable(4) is used for supplying power to the xenon lamp. A condenser lens(6) condenses the light source of the xenon lamp. A reflector(3) reflects the light source irradiated to an opposite side of the condenser lens to the condenser lens. A protection cover and a fan module are installed at the other side of the xenon lamp. A first reflector(7) reflects the beam supplied through the condenser lens to a beam transmission region(12). A second reflector(8) reflects the beam of the first reflector. A beam transmission lens(5) transmits the beam of the second reflector.